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CVD
  • Small Footprint
  • Temperature Control with High Acucuracy
  • High MTBF
제품 이미지
Heat exchanger

  • 설비 On-Tool형 Subminiature HX
  • Graphic panel Free(Portable GP)
  • Semi- S2 인증 기준에 의한 Safety Interlock 적용
SPECIFICATION
Model LC-40XCV LC-4040XC LC-50XH
Operating Range 30℃ ~ 90℃ 30℃ ~ 90℃ 30℃ ~ 160℃
Temp. Control Accuracy ±0.1℃ ±0.1℃ ±0.1℃
Cooling Capacity 8kW @20℃ 8kW @50℃ 5kW @50℃
Reservoir Tank 7Liter 10Liter 10Liter
Flow Rate 20 LPM @0.5Mpa 20 LPM @0.5Mpa 20 LPM @0.5Mpa
Process Fluid FC-40 or User Option GALDEN HT170 or FC-40 GALDEN HT270
Interface D-NET or User Option D-NET or User Option User Specification
Footprint 400(W) × 500(D) × 240 (H), 240(W) × 400(D) × 525(H) 380(W) × 1120(D) × 425 (H) 320(W) × 600(D) × 700 (H)
Electrical 200~220VAC, 50/60Hz, 3Phase 4Wire, 4.2kW , BRK20A 200~220VAC, 50/60Hz, 3Phase 4Wire, 11.2kW , ELB 60A 200~220VAC, 50/60Hz, 3Phase 4Wire, 7.2kW , ELB 30A
PCW 18℃ , 15LPM(0.3Mpa)이상 18℃ , 15LPM(0.3Mpa)이상 18℃ , 20LPM(0.3Mpa)이상
Weight 65㎏ 100㎏ 100㎏
 
ISO 9001:2000 벤처기업/Inno-biz